[labnetwork] Tencor P11 Surface Profiler

[Luciani, Vincent]

Hello Nan,

It' is not a P11 and we are not in the bay area but the XT (below) is a very capable 8" profilometer and with help from FedEx we will gladly turn this around quickly for you.  Give me a shout if you don't find a local solution.

Vince

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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iyer, Nandini
Sent: Thursday, December 06, 2012 4:13 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Tencor P11 Surface Profiler

Hi,

The group that I am working with has a process where the thickness of some metal bumps are measured on an 8" wafer. Our Tencor P11 surface profiler is down and we are looking for some options on getting these measurements done. The engineers would prefer to use a Tencor P11 surface profiler or something similar to this tool. Are there any places in the SF Bay Area with a Tencor profilometer that we could use?

Nan Iyer
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