[labnetwork] Tencor P11 Surface Profiler

Iyer, Nandini Nandini.Iyer at ucsf.edu
Thu Dec 6 16:13:02 EST 2012


Hi,

The group that I am working with has a process where the thickness of some metal bumps are measured on an 8" wafer. Our Tencor P11 surface profiler is down and we are looking for some options on getting these measurements done. The engineers would prefer to use a Tencor P11 surface profiler or something similar to this tool. Are there any places in the SF Bay Area with a Tencor profilometer that we could use?

Nan Iyer
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