[labnetwork] Process Chilled Water Question

[Rizik]

Depending on the type of tools you have, the RF generators used I saw PCW
water resistivity varying between - 50 k-ohm up to 1.5 Meg-Ohm. For example
a tool like ANELVA requires between 1 and 1.5 Meg-Ohm. Some
Several PCW systems that we are currently designing, our clients plan to
fill the system with RO water then use soft water for makeup. Corrosion
inhibitor and a biocide are also injected into the systems. 

 

 

Rizik Michael, PE

Principal

Integrated Engineering Services

Office: +408 261 3500, Ext. 201

Cell:      +408 718 0927

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Kuhn, Jeffrey G
Sent: Friday, December 07, 2012 4:39 AM
To: 'Lavallee, Guy P.'; 'labnetwork at mtl.mit.edu'
Subject: Re: [labnetwork] Process Chilled Water Question

 

Guy,

 

At Birck, our PCW resistivity spec is 1.0 Meg-ohm +/- .05 Meg-ohm. 

 

Regards,

 

Jeff Kuhn

Facility Engineer

Birck Nanotechnology Center

Purdue University

1205 W. State St.

West Lafayette, IN 47907

Ph:  (765) 496-8329

Fax: (765) 496-2018

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Lavallee, Guy P.
Sent: Thursday, December 06, 2012 3:04 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Process Chilled Water Question

 

Dear List,

    I wanted to get some feedback from other sites on what level of
conductivity / resistivity they are running their Process Chilled Water
(PCW) loop.   Any feedback would be greatly appreciated.

 

Thanks,

Guy

 

Penn State University's Nanofabrication Laboratory

Lead Facilities and Etch Engineer

Materials Research Institute

N-105 Millennium Science Complex (MSC Bldg)

University Park, PA 16802

Email: gpl107 at psu.edu

Phone: 814-865-9339

Cell: 814-777-0719

 

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