[labnetwork] Process Chilled Water Question

Kuhn, Jeffrey G kuhn1 at purdue.edu
Fri Dec 7 07:38:50 EST 2012


Guy,

At Birck, our PCW resistivity spec is 1.0 Meg-ohm +/- .05 Meg-ohm.

Regards,

Jeff Kuhn
Facility Engineer
Birck Nanotechnology Center
Purdue University
1205 W. State St.
West Lafayette, IN 47907
Ph:  (765) 496-8329
Fax: (765) 496-2018



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Lavallee, Guy P.
Sent: Thursday, December 06, 2012 3:04 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Process Chilled Water Question

Dear List,
    I wanted to get some feedback from other sites on what level of conductivity / resistivity they are running their Process Chilled Water (PCW) loop.   Any feedback would be greatly appreciated.

Thanks,
Guy

Penn State University's Nanofabrication Laboratory
Lead Facilities and Etch Engineer
Materials Research Institute
N-105 Millennium Science Complex (MSC Bldg)
University Park, PA 16802
Email: gpl107 at psu.edu<mailto:gpl107 at psu.edu>
Phone: 814-865-9339
Cell: 814-777-0719

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