[labnetwork] Hydrogen Generation

[mark crain]

Hi Dr. Ferraguto,

The University of Louisville considered the same option when building a new
facility several years ago and it met the high standards of our cleanroom
consultant Abbie Gregg.  The Hogen system we installed has been used
mostly to support or Oxford PECVD.  It has worked out very well for our
processing.  We purchased our first H2 generator in the late 90's for a
small bench top etcher,  I have never had any regrets for moving away from
the infrastructure required to support an H2 gas bottle.   It seems a great
option as long as it meets your purity and flow requirements.

I would be interested in hearing from others on the network, what
limitations they may see for an H2 generator.

Best Regards,


Mark Crain
University of Louisville
502/442-9727

On Wed, Jul 18, 2012 at 7:53 AM, Ferraguto, Thomas <Thomas_Ferraguto at uml.edu
> wrote:

>  Colleagues,****
>
> ** **
>
> We’re in the process of designing our gas cabinet and abatement layout for
> our fab.****
>
> ** **
>
> I just met with the sales representative from Proton and we’re looking at
> Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)***
> *
>
> ** **
>
> I can’t find any holes in the argument for Hydrogen generation for ~$12k,
> when a gas cabinet will cost me ~$20K****
>
> ** **
>
> Does anyone have any thoughts on this unit or Hydrogen generation in
> general ? (primarily for PECVD)****
>
> ** **
>
> Thanks…****
>
> ** **
>
> ** **
>
> Thomas S. Ferraguto****
>
> ETIC Clean Room Director****
>
> University of Massachusetts Lowell****
>
> 600 Suffolk Street 456C****
>
> Lowell MA 01854-5120****
>
> 978-934-1809 land****
>
> 617-755-0910 mobile****
>
> ** **
>
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