[labnetwork] Hydrogen Generation
Rizik
rizik at intengr.com
Wed Jul 18 18:37:37 EDT 2012
Hi Tom,
It was nice meeting you during the UGIM event. I am still at my promise to
visit with you in Mass. When using H2 generators, please make sure that
distribution piping form the generator to the tool is all welded. Mechanical
connections should be in exhausted enclosures and equipped with LEL sensors
interlocked with the generator.
Good luck.
Rizik Michael, PE
Principal
Integrated Engineering Services
Office: +408 261 3500, Ext. 201
Cell: +408 718 0927
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Ferraguto, Thomas
Sent: Wednesday, July 18, 2012 4:54 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Hydrogen Generation
Colleagues,
We're in the process of designing our gas cabinet and abatement layout for
our fab.
I just met with the sales representative from Proton and we're looking at
Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)
I can't find any holes in the argument for Hydrogen generation for ~$12k,
when a gas cabinet will cost me ~$20K
Does anyone have any thoughts on this unit or Hydrogen generation in general
? (primarily for PECVD)
Thanks.
Thomas S. Ferraguto
ETIC Clean Room Director
University of Massachusetts Lowell
600 Suffolk Street 456C
Lowell MA 01854-5120
978-934-1809 land
617-755-0910 mobile
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