[labnetwork] Hydrogen Generation - Data to consider

[Tom Britton]

Hi Thomas,

I did some checking and they make a nice unit. Depending on what you actually need it to do, it might be just what the doctor ordered.

Summary of my "research":


*         There are 2 Lab units; a GC600 (600 cc/min) and a GC4800 (4.8LPM). They have a smaller unit, but it's designed for a specific application and not applicable here.

*         The GC unit is designed primarily for gas chromatography service. The stainless tubing inside is passivated, not electropolished, and they use compression fittings. On the GC4800, you can get a VCR bulkhead out, but there are still compression fittings inside.

*         Purity looks good. The palladium purifier on the GC600 provides < 1 ppm H2O. The GC4800 uses a dryer to remove the moisture, but is still rated at <1 ppm. If your tool's moisture spec is tighter than this, they or you can provide an external purifier. (we have these at low cost)

*         These units are designed, as mentioned, for gas chromatography so they aren't designed to deliver continual stable flow if connected directly to an MFC, so you might see fluctuations in your MFC's output depending on what type of MFC you're using (Some are more stable than others. Can discuss if desired). It was recommended to set the generator at 200 psi and place an inline regulator in front of the tool to eliminate the pulsing.

*         There are no bottles to change so you save on gas purchases and maintenance related to bottle changes. You also will never have to worry about running out of gas.

*         Price:  The GC600 runs around $12K and the GC4800 runs between $50 and $60K.

Summary:

Good unit if it meets your applications. Low cost compared to a gas cabinet if your total flow is under 600 ccs. Uses compression fittings and passivated stainless tubing, which should be OK for research applications. Personally don't like the compression fittings on any UHP process, but on a dry H2 line, you should be OK. Would recommend switching to VCR style fittings and hard plumbing the line to the tool. If your flow is going to exceed 600 ccs, you can run 2 of these in parallel for 1.2 LPM and $24K, or get a gas cabinet for substantially less.

Hope this is of use.

Best Regards,

Tom Britton
Sales Manager
Critical Systems, Inc.
7000 W. Victory Road
Boise, ID 83709
Direct: 208-890-1417
Shop:   877-572-5515

[cid:image003.png at 01CD64C3.C7F624D0]

www.criticalsystemsinc.com<http://www.criticalsystemsinc.com/>




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ferraguto, Thomas
Sent: Wednesday, July 18, 2012 5:54 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Hydrogen Generation

Colleagues,

We're in the process of designing our gas cabinet and abatement layout for our fab.

I just met with the sales representative from Proton and we're looking at Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)

I can't find any holes in the argument for Hydrogen generation for ~$12k, when a gas cabinet will cost me ~$20K

Does anyone have any thoughts on this unit or Hydrogen generation in general ? (primarily for PECVD)

Thanks...


Thomas S. Ferraguto
ETIC Clean Room Director
University of Massachusetts Lowell
600 Suffolk Street 456C
Lowell MA 01854-5120
978-934-1809 land
617-755-0910 mobile

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