[labnetwork] Triscroll pump question

[Iulian Codreanu]

Rick,

The tip seals generate dark powder when they wear out.  Is it possible 
that yours wore out completely?

Iulian
---
iulian Codreanu, Ph.D.
Director, Penn NanoFab
200 South 33rd Street
Room 376 GRW Bldg
Philadelphia, PA 19104-6314
P: 215-898-9308
F: 215-573-2068
www.seas.upenn.edu/~nanofab

On 6/6/2012 7:49 AM, Morrison, Richard H., Jr. wrote:
> Hi All,
>
> We had a very interesting event happen 2 weeks ago on our Oxford tool.
> We have an Oxford PECVD/RIE tool. PECVD chamber on the left side for
> PECVD Nitride, Load in the center, RIE on the right hand side.
>
> The turbo on the load lock crashed and we discovered that the Varian
> Triscroll backing pump was off and the circuit breaker tripped.. We sent
> the pump out for repair and the inside of the pump was covered with
> black soot, it seems that the Pump had some sort of combustion event.
> The screen was blown outwards and it had a large hole in it. The only
> gas the load has in N2.
>
> When the pump self destructed it back-streamed gas into the load lock,
> we had the residue analyzed, and it was fluorinated hydrocarbon. We are
> completed stumped, has any of you had a TriScroll combust before.
>
> Thanks in advance for any help.
>
>
> Rick
>
> Rick Morrison
>
> Senior Member Technical Staff
>
> Group Leader Microfabrication Operations
>
> Draper Laboratory
>
> 555 Technology Square
>
> Cambridge, MA 02139
>
> W 617-258-3420
>
> C 508-930-3461
>
>
>
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