[labnetwork] reliable scroll pump

[Himmer, Phil]

Hello

 

I am in the process of replacing a Edwards GVSP 30 pump used to back a
cryo on an evaporator, the needle bearings went bad and damaged the
housing. Multiple pump suppliers have said that the Edwards GVSP are
poorly designed pumps and the triscroll 600 would be a better choice. I
have also been told that the Edwards is a bad copy of the Anest Iwata
ISP 500.

The equipment manufacturer likes the triscroll 600 for the cost and ease
of replacing the tip seals but does acknowledge that they do need
replacing at least every year.

Can anyone weigh in on which, if any, of these scroll pumps would be a
better choice or do they all have their own problems? 

 

Thanks

 

Dr. Phillip Himmer

Manager

Montana Microfabrication Facility

Montana State University

ph: 406-994-7178

 

 

 

 

 

 

From: labnetwork-bounces at mtl.mit.edu
[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven
Sent: Wednesday, June 06, 2012 10:03 AM
To: Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Triscroll pump question

 

I have some experience with these. First of all, depending on use, you
can expect 6 months to one year of service out of these which I find
unacceptable. Second of all, the fluorinated hydrocarbon residue is a
mixture of o-ring material and Teflon from the tip seals. After
rebuilding a bunch of them, I saw the same stuff in every pump housing
and it was a dark powdery substance. I can't explain the inlet screen
blowing outwards (upstream?) unless there was an event in your exhaust
somewhere downstream.

Hope this helps,

Steve Paolini 

Harvard University Center For Nanoscale Systems.

 

From: labnetwork-bounces at mtl.mit.edu
[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard
H., Jr.
Sent: Wednesday, June 06, 2012 7:49 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Triscroll pump question

 

Hi All,

 

We had a very interesting event happen 2 weeks ago on our Oxford tool.
We have an Oxford PECVD/RIE tool. PECVD chamber on the left side for
PECVD Nitride, Load in the center, RIE on the right hand side.

 

The turbo on the load lock crashed and we discovered that the Varian
Triscroll backing pump was off and the circuit breaker tripped.. We sent
the pump out for repair and the inside of the pump was covered with
black soot, it seems that the Pump had some sort of combustion event.
The screen was blown outwards and it had a large hole in it. The only
gas the load has in N2.

 

When the pump self destructed it back-streamed gas into the load lock,
we had the residue analyzed, and  it was fluorinated hydrocarbon. We are
completed stumped, has any of you had a TriScroll combust before.

 

Thanks in advance for any help.


Rick

 

 

Rick Morrison

Senior Member Technical  Staff 

Group Leader Microfabrication Operations

Draper Laboratory

555 Technology Square

Cambridge, MA  02139

 

W  617-258-3420

C   508-930-3461

 

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