[labnetwork] Experience etching YBCO superconducting films

[Vito Logiudice]

Hi all,

Since we do  not have access to an ion mill, one of our users is interested in attempting to develop an etch recipe for YBCO on our ICP RIE (Oxford ICP380). The system is currently used to etch a variety of materials including InAs, GaAs, Nb and Al.

I was wondering if anyone has experience etching such films on this type of system. We're specifically concerned about the potential for chamber contamination and adversely affecting our existing etch recipes.

Thanks very much for any insights.

Regards,
Vito
--
Vito Logiudice  M.A.Sc., P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
200 University Avenue West
Waterloo, ON      Canada   N2L 3G1
Tel:  1-519-888-4567  ext. 38703
Email: vlogiudi at uwaterloo.ca<mailto:vlogiudi at uwaterloo.ca>
Website: https://qncfab.uwaterloo.ca/

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