[labnetwork] we are looking for Surfscan equipment for wafer inspection

[Morrison, Richard H., Jr.]

We have a Surfscan at Draper, it can process 100mm and 150mm wafers.

Rick


Rick Morrison
Senior Member Technical  Staff
Group Leader Microfabrication Operations
Draper Laboratory
555 Technology Square
Cambridge, MA  02139

W  617-258-3420
C   508-930-3461


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of BenZ
Sent: Friday, May 04, 2012 6:44 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] we are looking for Surfscan equipment for wafer inspection

Dear All,

We are currently suffer from wafer surface quality inspection.

The KLA Surfscan could do this job, but we have not find any lab have it yet. We are around Boston.

It will be highly appreciated if any of you could provide any piece of info regarding it.

Thanks

BR
Ben

Electrical engineer
MTPV power corporation



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