[labnetwork] TMAH controls or substitutes
Linda Macks
linda.macks at unsw.edu.au
Tue Sep 4 02:06:55 EDT 2012
Hi all,
We are currently reviewing our processes using TMAH, and I would be grateful for any feedback re. safety controls or substitute chemicals, particularly for Si etching involving 25% concentration TMAH.
Many thanks,
Linda
Dr Linda Macks
Facility Manager, ANFF-NSW
Australian National Fabrication Facility
School of Electrical Engineering & Telecommunications
University of New South Wales
UNSW Sydney NSW 2052
Australia
Phone: +61 (2) 9385 7845
Fax: +61(2) 9385 5114
Email: linda.macks at unsw.edu.au<mailto:linda.macks at unsw.edu.au>
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