[labnetwork] question to cleanroom colleagues: distributed vs. manifolded gases...

[Iulian Codreanu]

Ian,

I use VMBs for hazardous gases (the threshold is 2).

I use the shared supply line for inerts.

Iulian
---
iulian Codreanu, Ph.D.
Director, Penn NanoFab
200 South 33rd Street
Room 376 GRW Bldg
Philadelphia, PA 19104-6314
P: 215-898-9308
F: 215-573-2068
www.seas.upenn.edu/~nanofab

On 9/20/2012 11:58 AM, Ian Harvey wrote:
> Dear micro/nano cleanroom colleagues:
>
> Please critique the following thought process and give your insight
> which approach is best in planning the process gas piping for a new
> installation.
>
> Which do you use (VMP/distributed) in your new facility or new tool
> installations and are you happy?
>
> If VMP's, what is the threshold number of tools for which you consider
> it justifiable to use VMP's?
>
> *valve manifold panels:*
> pro's:
> • clean, organized installation, flexible to any future installation,
> populated when needed
> • system contamination attained by ability to purge regulators with venturi
> • leaks or failures within isolated runs do not contaminate other
> processes or cause downtime on other tools
> • prevent cross-talk between process MFC's, using the same gases
> • does not cause system downtime when installing new processes
>
> Con's
> • up front cost is greater, though not sure how much
>
> *Process gases distributed through shared supply line, and laterals /
> drops:*
> pro's:
> • Up front cost is lower (not sure how much-- it depends...)
> • cross-talk can be minimized by a regulator at each tool
>
> Con's:
> • system downtime for all tools sharing the gases during
> • cost may be comparable depending upon number of valved drops, and how
> good the planning is for predicting future installation points
> • see pro's above in VMP
>
> Thank you all!
>
> --Ian
>
>
> ********************************************
> Ian R. Harvey, Ph.D.
> Research Associate Professor
> Department of Mechanical Engineering
> Adjunct Associate Professor
> Department of Electrical & Computer Engineering
> 2511 SMBB (USTAR)
>
> Associate Director,
> Utah Nanofab &
> Micron Microscopy Core
>
> 801/585-6162 (voicemail)
> 801/581-5676 (lab main number)
> www.nanofab.utah.edu <http://www.nanofab.utah.edu>
>
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>
>
>
>
>
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