[labnetwork] ion-implantion & CO2 snow cleaning

[Robert M. Hamilton]

Colleagues,

Two general questions:

Can anyone provide experience with implants from Cutting 
Edge Ions? We have used Innovion (formerly CORE) with good 
results; however, we like to provide our members choices for 
specialized services and prefer to do this based on experience.

We find the NanoLab need for specialized cleaning services, 
such as PVD shields and etch chamber liners is increasing. 
There are some cleaning tasks that traditional 
bead-blasting, chemical etching and plasma do not address, 
such as stripping Parylene from a coater. Is anyone familiar 
with CO2 snow cleaning? Is this a technology that can be 
brought in-house?

Thank you in advance,
Bob Hamilton

-- 
Bob Hamilton
Marvel NanoLab
University of CA at Berkeley
Rm 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
bob at eecs.berkeley.edu
(e-mail preferred)
510-809-8600
510-325-7557 (mobile - emergencies)