[labnetwork] Phosphine sources

Tue Aug 13 17:00:06 EDT 2013

Dear Colleagues, 

I remember hearing (I think it was UGIM) about NIST using sub-atmospheric sources for doping gases (e.g. phosphine, diborane).  I was wondering if you have similar experience or do I need to plan for the traditional gas feeds via a cabinet from our HPM bunker?

Best,

Dr. Michael Khbeis
Associate Director
Microfabrication Facility (MFF)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
http://www.engr.washington.edu/mff/