[labnetwork] Phosphine sources

[Bill Flounders]

UC Berkeley reviewed sub atmospheric (SA) delivery several years ago.
While the technology had some specific advantages it had the
following reservations:
1. there was only single supplier of SA cylinders and hence only
a single supplier of that gas. No competition for cost
savings - you become a captive customer for that gas.
2. The vendor required we purchase and install a specific
gas cabinet / gas panel to insure protection of their custom
cylinder with absorbent media. No competition for gas cabinet
savings - you become captive customer for that gas cabinet
- and it was relatively expensive.
3. Only select pure gases can be provided. Gas mixtures not
possible due to variable gas desorption rates with gas mixtures.
Not all pure gases compatible with absorbent media.
4. Unclear if authority having jurisdiction (AHJ) will relax
any containment and detection requirements. You will likely
still pursue all containment and detection best practices.

Bill Flounders
UC Berkeley




Michael Khbeis wrote:
> Dear Colleagues,
>
> I remember hearing (I think it was UGIM) about NIST using sub-atmospheric sources for doping gases (e.g. phosphine, diborane).  I was wondering if you have similar experience or do I need to plan for the traditional gas feeds via a cabinet from our HPM bunker?
>
> Best,
>
> Dr. Michael Khbeis
> Associate Director
> Microfabrication Facility (MFF)
> University of Washington
> Fluke Hall, Box 352143
> (O) 206.543.5101
> (F) 206.221.1681
> (C) 443.254.5192
> khbeis at uw.edu
> http://www.engr.washington.edu/mff/
>
>
>
>
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