[labnetwork] Electromask/TRE mask making unit, model CC251-5X
Coy, John A
jcoy at purdue.edu
Wed Jan 9 10:04:21 EST 2013
Lab Network members,
The Birck Nanotechnology Center at Purdue is accepting offers on an Electromask/TRE mask making system, model CC251-5X. The system is fully operational and currently installed in our cleanroom. It is capable of writing patterns down to 1.5 microns with a die size less than 2x2cm and 3 microns for die above 2x2cm. It can produce photomasks ranging in size from 3x3 inch to 8x8 inch. The image repeater camera is a 5x reduction lens. Full system specifications can be sent upon request. Please contact me with any questions.
Best Regards,
John
--
John Coy
Microfab Research Engineer
Birck Nanotechnology Center
Purdue University
jcoy at purdue.edu<mailto:jcoy at purdue.edu>
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