[labnetwork] Question regarding SF6 intermediate gas delivery line pressures

[Robert M. Hamilton]

Colleagues,

What is the preferred line pressure for delivering SF6 from 
a gas vault to a valve-manifold box?

The SF6 cylinder pressure in our indoor cylinder vault is 
~320 psi. The final delivery pressure is ~18-22 psi. There 
is a cylinder regulator at the cylinders as well as line 
pressure regulators in the VMB. Our delivery volume varies 
from ~100 sccm to 1.5 slpm.

Thanks for any enlightenment,
Bob Hamilton


-- 
Bob Hamilton
Marvel NanoLab
University of CA at Berkeley
Rm 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
bob at eecs.berkeley.edu
(e-mail preferred)
510-809-8600
510-325-7557 (mobile - emergencies)