[labnetwork] ZnS sputtering

[raghavan]

Dear all

We have a request from a tool user to sputter ZnS in our sputter tool. Our
sputter tool is a share tool used by many users. I would like to know from
experienced users if ZnS sputtering needs any extra precautions to be taken?
Does it contaminate the chamber? 

Thank you 

Best wishes

Raghavan

 

*************************************************

Dr.Vijayaraghavan

Technology Manager

National Nanofabrication Centre 

Centre for Nano Science and Engineering

Indian institute of Science ( IISc)

Bangalore - 560 012

India

Ph: 09663304316

http://sindhu.ece.iisc.ernet.in/nanofab/twikii/bin/view/Main/WebHome

***************************************************

 


-- 
This message has been scanned for viruses and
dangerous content by MailScanner, and is
believed to be clean.

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20130510/3e95f830/attachment.html>