[labnetwork] ZnS sputtering

[Joe Palmer]

While I have no personal experience with the material, I'd guess that 
there's the possibility of having separate Zn and S deposits, and Zn 
will contaminate the chamber.  Also, the Kurt Lesker chart that I have 
recommends a dedicated vacuum system.

Regards,

Joe Palmer

On 5/10/2013 1:53 AM, raghavan wrote:
>
> Dear all
>
> We have a request from a tool user to sputter ZnS in our sputter tool. 
> Our sputter tool is a share tool used by many users. I would like to 
> know from experienced users if ZnS sputtering needs any extra 
> precautions to be taken? Does it contaminate the chamber?
>
> Thank you
>
> Best wishes
>
> Raghavan
>
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