[labnetwork] Equipment question

[Morrison, Richard H., Jr.]

Hi Everyone,

I am quoting new Oxidation and LPCVD stacks. I have quotes from Sandvic/MRL, Tempress and Thermco. The system will have a boat loader, oxidation stack has Dry/Wet (torch) oxide and anneal with forming gas. The LPCVD stack is Poly, Nitride and SiC.

Do any of you have experience with any of these vendors, looking for ease of use , maintenance and reliability.

Thanks in advance.


Thanks
Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

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