[labnetwork] Equipment question

[Bill Flounders]

Rich,
I try to avoid using Lab Network for explicit vendor promotion.
I will simply say I would also include Tystar in your quote requests.
Off line I am pleased to share our furnace experience.

Bill Flounders
UC Berkeley



Morrison, Richard H., Jr. wrote:
>
> Hi Everyone,
>
> I am quoting new Oxidation and LPCVD stacks. I have quotes from 
> Sandvic/MRL, Tempress and Thermco. The system will have a boat loader, 
> oxidation stack has Dry/Wet (torch) oxide and anneal with forming gas. 
> The LPCVD stack is Poly, Nitride and SiC.
>
> Do any of you have experience with any of these vendors, looking for 
> ease of use , maintenance and reliability.
>
> Thanks in advance.
>
> Thanks
>
> Rick
>
> Draper Laboratory
>
> Group Leader Microfabrication Operations
>
> 555 Technology Square
>
> Cambridge Ma, 02139-3563
>
> www.draper.com
>
> rmorrison at draper.com
>
> W 617-258-3420
>
> C 508-930-3461
>
>
>
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