[labnetwork] And STS too… Re: Alcatel/Tegal DRIE support

Scott Blondell spb1699 at rit.edu
Thu Aug 14 11:15:31 EDT 2014


We used Class One Eqpt. in GA to help bring our vintage STS ASE on-line. It was a donated tool with more than
its share of "issues". Running well since January start-up visit. 

Scott Blondell
Facilities Manager
RIT SMFL
________________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Leif Johansen [lej at danchip.dtu.dk]
Sent: Wednesday, August 13, 2014 3:30 AM
To: 'Ian Harvey'; Matthieu Nannini
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] And STS too…   Re:  Alcatel/Tegal DRIE support

Hello Ian,

Two of our service engineers are former STS employees (a good solution when you have 10 STS tools - the oldest dating back to 1993). They won't mind answering a question or two, so if you have any, drop me a line.

Several of the "old school" service engineers are now freelance. For a year 2000 system, I'm told that Gareth Morgan could be a good call. He has setup his own company based in the UK and is willing to travel - <gareth.morgan at homecall.co.uk>

Best regards,

Leif




-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ian Harvey
Sent: 12. august 2014 23:14
To: Matthieu Nannini
Cc: labnetwork at mtl.mit.edu
Subject: [labnetwork] And STS too… Re: Alcatel/Tegal DRIE support

Dear Mathieu and colleagues

We have the same question about STS...  Who do you call when you run out of troubleshooting ideas on a 2000-vintage STS DRIE?

Thanks,

—Ian

Utah Nanofab / University of Utah
Micron Technology Foundation Inc., Microscopy Suite Sorenson Molecular Biotechnology Building — A USTAR Innovation Center


On Aug 12, 2014, at 1:21 PM, Matthieu Nannini wrote:

Dear colleagues,

For those of you who own an Alcatel/Tegal DRIE, where do you get support from ? Our service guy (former Alcatel Eng. in France) is hard to get a hand on.

Thanks

Matthieu

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