[labnetwork] Co Deposition

[Onur Serbest]

Dear all,

We are thinking to make Co deposition with e-beam evaporator. But we have
no experience about it.

We are afraid of contaminating our chamber. If it contaminates; how can we
clean it. Also is there anything special we should do before and after
deposition.

If anyone with Co deposition experience could help us we would be grateful.

Thanks already.

Best Regards.

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Onur SERBEST
Cleanroom Specialist
Process Engineer
Sabanci University Nanotechnology Research and Application Center,
Orhanli - Tuzla, 34956, Istanbul, Turkey.
Phone: +90 (216) 483 9993
Fax: +90 (216) 483 9885
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