[labnetwork] Co Deposition

[Bob Hamilton]

Onur Serbest,

Re: E-beam and more general PVD tool cleanlieness management

Onur,

At Berkeley we manage PVD tool cleanliness with the use of replaceable 
shielding. Our shields are fabricated from thin stainless steel. We 
maintain at least two sets, one in the tool, the other as a spare. We 
also use aluminum foil to sometimes cover these shields and to cover 
areas where shields aren't practicable given deposited films are 
line-of-sight.

For health and safety reasons we do not allow our researchers to use N2 
blowguns to cleanup metal flakes common in a PVD process. It seemed 
simplest for us to consider all metal aerosoles as hazardous rather than 
to try and keep up on such issues. It seems half the periodic table is 
getting used these days. We employ a HEPA vacuum for such cleanup work.

Fortunately, UC Berkeley is situated in an area that has several 
semiconductor parts cleaning services and we use such services. 
Previously we employed 200 mm borosilicate glass chimneys which were 
either disposable or cleanable in an acid such as aqua-regia. In the 
case of a metal chambers we'd use a grinder with a metal brush.

Our PVD systems incorporate "venetian-blind" view ports, i.e. windows 
that use a series of overlapping glass slides to intercept evaporants 
from the viewport window. The slides are cheap; we throw them away as 
needed.

If you would like some photos, e-mail me.

Regards,
Bob Hamilton

-- 
Robert Hamilton
University of California at Berkeley
Marvell NanoLab
Equipment Eng. Mgr.
Room 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
bob at eecs.berkeley.edu
Phone: 510-809-8600
Mobile: 510-325-7557
e-mail preferred




On 2/12/2014 11:34 PM, Onur Serbest wrote:
> Dear all,
>
> We are thinking to make Co deposition with e-beam evaporator. But we 
> have no experience about it.
>
> We are afraid of contaminating our chamber. If it contaminates; how 
> can we clean it. Also is there anything special we should do before 
> and after deposition.
>
> If anyone with Co deposition experience could help us we would be 
> grateful.
>
> Thanks already.
>
> Best Regards.
>
> -- 
> ---   ---   ---   ---
>
> Onur SERBEST
> Cleanroom Specialist
> Process Engineer
> Sabanci University Nanotechnology Research and Application Center,
> Orhanli - Tuzla, 34956, Istanbul, Turkey.
> Phone: +90 (216) 483 9993
> Fax: +90 (216) 483 9885
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
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-- 
Robert Hamilton
University of California at Berkeley
Marvell NanoLab
Equipment Eng. Mgr.
Room 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
bob at eecs.berkeley.edu
Phone: 510-809-8600
Mobile: 510-325-7557
e-mail preferred

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