[labnetwork] Brand recommandation
Morrison, Richard H., Jr.
rmorrison at draper.com
Fri Jan 10 07:24:39 EST 2014
We purchased and have been operating a nice little R&D ALD tool from a company in Sudbury Mass called Arradiance unit is a GEMSTAR-8.
A little caution here every 10um of deposition you have to clean the chamber by bead blasting and the source chemicals are expensive but overall it is 95% up time and the process is very stable.
We have Disco dice saw the latest model and it is very good, model is DAD 3240 very good for our MEMS operation. Our MCM line uses ADT-7100. Both saws have >95% uptime with good service from both companies.
Rick
Draper Laboratory
Principle Memeber of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563
www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461
-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr.
Sent: Tuesday, January 07, 2014 4:38 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Brand recommandation
Dear colleagues,
We received money to buy new tools in 2014 and, before you all get too busy in 2014, I would like to get your input (brand of choice) for the followings:
- dicing saw
- ICP for F processes
- ALD
- Laser direct writer
- Developing station
Thanks in advance
Matthieu Nannini
McGill Nanotools Microfab
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