[labnetwork] Brand recommandation

[Aebersold,Julia W.]

We have a lovely Beneq ALD that is very nice and a Disco Dicing Saw.

Cheers!

Julia Aebersold, Ph.D. 
MNTC Cleanroom Manager
Shumaker Research Building, Room 233
2210 South Brook Street
University of Louisville
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr.
Sent: Friday, January 10, 2014 7:25 AM
To: Matthieu Nannini, Dr.; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Brand recommandation

We purchased and have been operating a nice little R&D ALD tool from a company in Sudbury Mass called Arradiance  unit is a GEMSTAR-8.

A little caution here every 10um of deposition you have to clean the chamber by bead blasting and the source chemicals are expensive but overall it is 95% up time and the process is very stable.

We have Disco dice saw the latest model and it is very good, model is DAD 3240 very good for our MEMS operation. Our MCM line uses ADT-7100. Both saws have >95% uptime with good service from both companies.


Rick


Draper Laboratory
Principle Memeber of the Technical Staff Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461




-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr.
Sent: Tuesday, January 07, 2014 4:38 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Brand recommandation

Dear colleagues, 

We received money to buy new tools in 2014 and, before you all get too busy in 2014, I would like to get your input (brand of choice) for the followings: 
- dicing saw
- ICP for F processes
- ALD
- Laser direct writer
- Developing station

Thanks in advance

Matthieu Nannini
McGill Nanotools Microfab
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