[labnetwork] Heated gas lines

[Fouad Karouta]

Dear Matthieu,

Our BCl3 is located in a gas cabinet in a gas shed outside our lab at about 8m of the ICP system. We heat the line (35°C) from the process valve on the gas panel till the begin of the gasline in the system gaspod. We don't use a gradual heating so don't exclude that such a gradient exists as our heater regulator is located near the ICP system. We never had flow problems. 
Another point worth mentioning: We do have a pressure regulator on the cylinder and recently we experienced a problem with a C4F8 cylinder used without any pressure regulator (as inherently it has low vapour pressure) and despite heating the line we get an intermittent flow and this was solved when we retrofitted a pressure regulator with a gauge on the secondary side. I believe the gauge helped to get a regular flow out of the cylinder maintaining a constant pressure in the line after the gauge.

Kind regards, 
Fouad Karouta

*********************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
Australian National University
ACT 0200, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au
http://anff-act.anu.edu.au/index.htm

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bob Henderson
Sent: Friday, 4 July 2014 7:24 AM
To: 'Matthieu Nannini'; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Heated gas lines

Matthieu:

It has been my recent experience depending on which gas and its vapor pressure to locate the source bottle as close to your reactor gas inlet as possible. Be sure to use the appropriate flow controller such as an MKS 1150C and heat tape the lines from your source bottle to the flowmeter and the lines leading into your chamber for best results. You can also contact Tom Britton who is a frequent contributor to this site as they are in this business and know what they are talking about. Bob Henderson

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Matthieu Nannini
Sent: Thursday, July 03, 2014 11:22 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Heated gas lines

Dear colleagues,

We are undergoing an analysis of our gas network and I would like to get the best practices out there.

For gases that need to be heated in order to avoid condensation, is it best to have the cabinet as close as possible to the tool ? Or, if one wants to consolidates all gases in the same area, could we have them far away ? if yes, how do you address the condensation issue.

Thanks

--
-----------------------------------
Matthieu Nannini
McGill Nanotools Microfab

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