[labnetwork] STS owners: third party (or original parts supplier) source for ESC?

[Dennis Grimard]

Ian:

You can repair ceramic ESC's with superglue ... but it never lasts.  The
key to ESC's working is that they "chuck" the wafer sufficiently that the
helium does not leak.  Typically the ESC is damaged electrically and
therefore cannot maintain charge separation and therefore cannot establish
the Coulombic chucking force necessary to prevent helium leakage ...
leading to poor heat transfer in a vacuum environment.

It is highly likely you need to replace the ESC.  They are expensive.  We
are exploring using a supplier CRC to help replace the OEM part from STS.
 The owners name is Brent Elliot ... great person to work with good honest
company.  They may be reached by phone at 408-562-4000.

Lastly, another primary cause of poor performance is the dc circuit itself.
 If the circuit is compromised such that it cannot establish the proper
voltage on the ESC electrode ... your toast.  Also, the DC bias circuit
which biases the ESC DC supplies to the plasma potential may be failing ...
this will lead to an  incorrect chucking voltage relative to the plasma
leading to poor charge development and poor helium sealing.

There are many manufactures of ESC ... only a few reliable ones ...

Good luck ...


On Thu, Jul 10, 2014 at 10:11 AM, Ian Harvey <IRHarvey at eng.utah.edu> wrote:

> Dear STS owners among Labnetwork Colleagues,
>
> We now have our used STS ASPECT DRIE online, and have likely discovered
> one of the key reasons this unit was originally placed on the used market:
>  the electrostatic chuck indicates localized plasma/heat damage, and we
> therefore have erratic backside cooling and nonuniform etching.
>
> Any hints from battle-wizened colleagues on where to source parts for STS
> systems, particularly items such as chucks that STS themselves likely
> source from others?  Best practices for working with STS?
>
> Thank you!
>
> —Ian
>
> p.s. As suggested by John Shott and Duane Boning (many thanks!) I used and
> bookmarked the google search:
>
> labnetwork STS parts supplier site:www-mtl.mit.edu
>
> ...along with a few other search terms.  This gave me the confidence that
> the question had likely not been asked yet...
>
> ********************************************
> Ian R. Harvey, Ph.D.
> Associate Director
> Utah Nanofab
> Cleanroom Fabrication and Surface Analysis & nano-scale Imaging
> 801/585-6162 (voicemail)
> www.nanofab.utah.edu
>
>
>
>
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>


-- 
Dennis S Grimard, Ph.D
Managing Director, Lurie Nanofabrication Facility

University of Michigan
1246D EECS Building
1301 Beal Avenue
Ann Arbor, MI 48109-2122
(734) 368-7172 (Cell)
(734) 647-1781 (Fax)
http://www.lnf.umich.edu
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