[labnetwork] regulator question

[Mike Young]

Hi Rick. We were also seeing fluctuations in our C4F8 flow at the tool. We mitigated this by adding a regulator at the cylinder, set to ~8 psig (we were previously running the line at cylinder pressure, with no regulator at all). We encountered no need for line or cylinder heating/cooling/insulation. Our gas cabinet room seems to maintain pretty good temperature control.

--Mike


On Jul 17, 2014, at 8:42 AM, Morrison, Richard H., Jr. <rmorrison at draper.com> wrote:

> Hi,
>  
> My gas room has no temperature control and I am having delivery problems with C4F8 tank. I have a Tescom-100 regulator on the bottle (part of a gas panel 6+ years old).  My question is should I wrap the tank with a blanket to keep it constant temperature?  I have this issue when there are large temperature swings outside my gas room is 70F +-8F
>  
> Is the regulator I am using the proper one? Any suggestions are welcome.
> 
> Rick
>  
>  
> Draper Laboratory
> Principal  Member of the Technical Staff
> Group Leader Microfabrication Operations
> 555 Technology Square
> Cambridge Ma, 02139-3563
>  
> www.draper.com
> rmorrison at draper.com
> W 617-258-3420
> C 508-930-3461


-- 
Michael P. Young                                (574) 631-3268 (office)
Nanofabrication Specialist                      (574) 631-4393 (fax)
Department of Electrical Engineering            (765) 412-6728 (cell)
University of Notre Dame                         mike.young at nd.edu
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637






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