[labnetwork] Query on safety concern

[vanaparthy at ee.iitb.ac.in]

 Hi Leonard ,
 Thanks,We installed Gas detection system in loading
area to take care  of any issue with toxic gas is detected,appropriate
alarms and evacuations will be initiated.


-- 
Thanks & Regards,
V.RAJENDRA PRASAD

> V,
>
> Diborane and Phosphine gases are very toxic and deadly...
>
> I'm not sure why you are not using the ll's for sample transfer.  It would
> appear that an SOP would employ the use of load locks to create a barrier
> between the reaction chamber and the outside world.  I would be concerned
> about a failure in your gas delivery system or even outgassing during the
> opening of the process chamber.
>
> 5X N2 pump purges in my opinion is not nearly enough.  A typical pump
> purge for toxic gas cylinder changes is at least 25x.  Are you using a
> Nederman style snorkel exhaust or any fume exhaust abatement whilst
> unloading your samples?  Are you using any PPE or supplied air masks?
>
> You may want to consider keeping your process chamber under vacuum to keep
> its integrity. Ambient moisture from atmosphere upon opening the chamber
> will surely create unwanted fumes and contaminates.
>
> How large is chamber?
>
> Thank you,
>
> -Len
>
> Leonard E. Olona
> University Cleanroom Manager
> University of Oklahoma
> 110 West Boyd Street Rm 550
> Norman, Oklahoma  73019
> D: +1- 405 325-4374
> C: +1- 405 630-9068
> F: +1- 405 325-7066
>
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> On 3/24/14 10:40 AM, "vanaparthy at ee.iitb.ac.in" <vanaparthy at ee.iitb.ac.in>
> wrote:
>
>>Hello,
>>
>>
>>We have a indigenous Plasma Immersion Ion Implantation system in our lab
>>which is capable to P(B2H6) and n(PH3) type of implantation. We are not
>>using the load lock for loading/Unloading the sample, Execute this by
>>venting the process chamber to atmosphere. Before unloading the sample we
>>do the pump purge with N2 gas  for five times.
>>
>>Is the above procedure followed by us is a standard procedure or do we
>>need to follow some more safety precautions before opening the chamber.
>>
>>Please advise.
>>
>>
>>
>>--
>>Thanks & Regards,
>>V.RAJENDRA PRASAD
>>  Lab Manager,
>>  CEN,IITBNF, Electrical Engg Dept, Annexe,
>>  IIT Bombay, Mumbai, Powai- 400076
>>  Tel No.+91 9930621667
>>
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>
>


-- 
Thanks & Regards,
V.RAJENDRA PRASAD
  Lab Manager,
  CEN,IITBNF, Electrical Engg Dept, Annexe,
  IIT Bombay, Mumbai, Powai- 400076
  Tel No. 9930621667