[labnetwork] Query on safety concern

[Olona, Leonard E.]

V,

Diborane and Phosphine gases are very toxic and deadly...

I'm not sure why you are not using the ll's for sample transfer.  It would
appear that an SOP would employ the use of load locks to create a barrier
between the reaction chamber and the outside world.  I would be concerned
about a failure in your gas delivery system or even outgassing during the
opening of the process chamber.

5X N2 pump purges in my opinion is not nearly enough.  A typical pump
purge for toxic gas cylinder changes is at least 25x.  Are you using a
Nederman style snorkel exhaust or any fume exhaust abatement whilst
unloading your samples?  Are you using any PPE or supplied air masks?

You may want to consider keeping your process chamber under vacuum to keep
its integrity. Ambient moisture from atmosphere upon opening the chamber
will surely create unwanted fumes and contaminates.

How large is chamber?

Thank you, 

-Len

Leonard E. Olona
University Cleanroom Manager
University of Oklahoma
110 West Boyd Street Rm 550
Norman, Oklahoma  73019
D: +1- 405 325-4374
C: +1- 405 630-9068
F: +1- 405 325-7066





 




On 3/24/14 10:40 AM, "vanaparthy at ee.iitb.ac.in" <vanaparthy at ee.iitb.ac.in>
wrote:

>Hello,
>
>
>We have a indigenous Plasma Immersion Ion Implantation system in our lab
>which is capable to P(B2H6) and n(PH3) type of implantation. We are not
>using the load lock for loading/Unloading the sample, Execute this by
>venting the process chamber to atmosphere. Before unloading the sample we
>do the pump purge with N2 gas  for five times.
>
>Is the above procedure followed by us is a standard procedure or do we
>need to follow some more safety precautions before opening the chamber.
>
>Please advise.
>
>
>
>-- 
>Thanks & Regards,
>V.RAJENDRA PRASAD
>  Lab Manager,
>  CEN,IITBNF, Electrical Engg Dept, Annexe,
>  IIT Bombay, Mumbai, Powai- 400076
>  Tel No.+91 9930621667
>
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