[labnetwork] Does anyone use forming gas in vacuum systems

[Charles Ellis]

Bruce,

We have been using it successfully for a while to reduce the oxide on our ALD Ru films before TSV plating. The vacuum level is ~ 450 mTorr using a standard N2 PURGED fomblin oiled rotary vane pump. It's a dedicated Glass BellJar system with a graphite heater plate (~ 300 C). I don't know the exact flow, as we use a needle valve to adjust the pressure.

Charles…



From: Bruce Tolleson <betemc at rit.edu<mailto:betemc at rit.edu>>
Date: Thursday, May 1, 2014 9:39 AM
To: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Does anyone use forming gas in vacuum systems

Dear Labnetwork,
  I have a project that requires forming gas (5% hydrogen, 95% Nitrogen) for gettering to reflow metal in a vacuum chamber. Has anyone done forming gas in a vacuum system and what precautions are required for the pumping system?

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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