[labnetwork] Venting Tools with Building Nitrogen

[Morrison, Richard H., Jr.]

HI,

Here at Draper we use bulk LN2 and  draw off the gas via an evaporator. The main runs are 1" diameter SS lines feeding a bunch of labs. Our distribution system in the Microfab is oxygen free copper silver soldered, with SS valves and SS lines running to the tools.. When the system was installed the Nitrogen was analyzed and found to be as follows:

Dew Point 3.5ppm
CO  0.09ppm
NO 0.16ppm
O2 0.45ppm
Total Hydrocarbons  0.15ppm

We have never seen any kind of issue with regards to the purity for venting we have never seen an issue.

Hope this helps.

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461





From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Milan Begliarbekov
Sent: Friday, October 31, 2014 12:15 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Venting Tools with Building Nitrogen

Hi All,

At the moment we're trying to decide the purity / source of the nitrogen we will use to vent our tools. The building has a bulk nitrogen system that is plumbed to the clean room in copper pipes. Our clean room contractor believes that that nitrogen might be too dirty to use as a vent gas and recommends ultra pure nitrogen. I am wondering if anyone has thoughts on this matter. I believe that it is possible to get 99.998 % N2 out of copper pipes. Is that the case? If not are there purifiers / dryers that are commonly used? This is only a vent gas and not a process gas.

Any wisdom in this matter will be highly appreciated.

Best,

milan
Technical Cleanroom Manager
CUNY Advanced Science Research Center
Milan.Begliarbekov at asrc.cuny.edu<mailto:Milan.Begliarbekov at asrc.cuny.edu>
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