[labnetwork] Ytterbium sputtering in ATC 2200
Udayan Ganguly
udayan.ganguly at gmail.com
Mon Nov 3 14:15:41 EST 2014
Hi Mike,
Thanks for you comment.
The sputter chuck is high temperature capable for depositing
crystalline oxides.
.
However I dont plan to use any heating during Yb deposition.
I also plan to use separate chucks for heated substrate operation
for other materials..
So hopefully Yb may not be exposed to heat.
I am curious if the Yb may cause vacuum issues in case
it outgasses like say ZnO during unheated operations..
Thanks!
On Tue, Nov 4, 2014 at 12:23 AM, Mike Young <myoung6 at nd.edu> wrote:
> Kamal,
>
> I could be way off base here, but one reason you might not have received
> responses yet is the juxtaposition of “sputtering” and “800 C”. I myself
> have never heard of a sputtering system which could operate anywhere near
> 800 C. What am I missing here?
>
> —Mike
>
>
> On Nov 3, 2014, at 11:16 AM, Kamal Yadav <kamal.yadav at gmail.com> wrote:
>
> Dear All,
>
> Awaiting help on ytterbium query below. The data got jumbled so attaching
> a pic.
>
> Thanks,
> Kamal.
>
>
> --
> Michael P. Young (574) 631-3268 (office)
> Nanofabrication Specialist (574) 631-4393 (fax)
> Department of Electrical Engineering (765) 412-6728 (cell)
> University of Notre Dame mike.young at nd.edu
> B-38 Stinson-Remick Hall
> Notre Dame, IN 46556-5637
>
> "People can be divided into 3 groups - those that make things happen,
> those that watch things happen, and those that wonder what happened." *Within
> which group do you belong?*
>
>
>
>
>
>
>
--
Associate Professor
Dept of Electrical Engineering, Indian Institute of Technology Bombay
+91-22-25767698 (o) +91-9920977698 (m)
http://www.ee.iitb.ac.in/wiki/faculty/udayan
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20141104/29e24849/attachment.html>
More information about the labnetwork
mailing list