[labnetwork] DekTak XT vs AlphaStep D500

[Michael Khbeis]

We just went through this exercise.  The limiting factor on the KLA was lack of rotation alignment capabilities. 


Dr. Michael Khbeis
Associate Director, Washington Nanofabrication Facility (WNF) 
National Nanotechnology Infrastructure Network (NNIN)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
www.wnf.washington.edu/



> On Nov 19, 2014, at 1:31 PM, White, Robert D. <R.White at tufts.edu> wrote:
> 
> LabNetwork,
>  
> Tufts Microfab is trying to decide whether to get a AlphaStep D500 (KLA-Tencor) or DekTak XT-S, primarily for step height and surface roughness measurements.  We will also try to measure thin film stress using wafer curvature.  We are replacing our DekTak 6M which died.
>  
> Does anyone have direct experience with the two tools and an opinion about quality, ease of use, robustness and service?
>  
> Thanks,
>  
> Rob
> --
> Robert White
> Associate Professor
> Mechanical Engineering
> Tufts University
> Medford, MA 02155
> (617) 627-2210
>  
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