[labnetwork] DekTak XT vs AlphaStep D500

[White, Robert D.]

LabNetwork,

Tufts Microfab is trying to decide whether to get a AlphaStep D500 (KLA-Tencor) or DekTak XT-S, primarily for step height and surface roughness measurements.  We will also try to measure thin film stress using wafer curvature.  We are replacing our DekTak 6M which died.

Does anyone have direct experience with the two tools and an opinion about quality, ease of use, robustness and service?

Thanks,

Rob
--
Robert White
Associate Professor
Mechanical Engineering
Tufts University
Medford, MA 02155
(617) 627-2210

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