[labnetwork] Venting Tools with Building Nitrogen

[Milan Begliarbekov]

Hi All,

At the moment we're trying to decide the purity / source of the nitrogen we will use to vent our tools. The building has a bulk nitrogen system that is plumbed to the clean room in copper pipes. Our clean room contractor believes that that nitrogen might be too dirty to use as a vent gas and recommends ultra pure nitrogen. I am wondering if anyone has thoughts on this matter. I believe that it is possible to get 99.998 % N2 out of copper pipes. Is that the case? If not are there purifiers / dryers that are commonly used? This is only a vent gas and not a process gas.

Any wisdom in this matter will be highly appreciated.

Best,

milan
Technical Cleanroom Manager
CUNY Advanced Science Research Center
Milan.Begliarbekov at asrc.cuny.edu
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