[labnetwork] Venting Tools with Building Nitrogen

[Lian, Yaguang]

Milan,

I think 99.998% N2 is good enough to vent the tools. After a tool (mostly chamber) is vented by N2, we usually open it. And the tool (chamber) will be exposed to ambient air.  So the purity of N2 is not a big deal.

Regards,

Yaguang Lian

Research Engineer
2306 Micro and Nanotechnology Laboratory
University of Illinois at Urbana-Champaign
208 N. Wright St.
Urbana, IL 61801
Phone: 217-333-8051
Email: yglian at illinois.edu


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Milan Begliarbekov
Sent: 2014年10月31日 11:15
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Venting Tools with Building Nitrogen

Hi All,

At the moment we're trying to decide the purity / source of the nitrogen we will use to vent our tools. The building has a bulk nitrogen system that is plumbed to the clean room in copper pipes. Our clean room contractor believes that that nitrogen might be too dirty to use as a vent gas and recommends ultra pure nitrogen. I am wondering if anyone has thoughts on this matter. I believe that it is possible to get 99.998 % N2 out of copper pipes. Is that the case? If not are there purifiers / dryers that are commonly used? This is only a vent gas and not a process gas.

Any wisdom in this matter will be highly appreciated.

Best,

milan
Technical Cleanroom Manager
CUNY Advanced Science Research Center
Milan.Begliarbekov at asrc.cuny.edu<mailto:Milan.Begliarbekov at asrc.cuny.edu>
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