[labnetwork] Venting Tools with Building Nitrogen

[Fouad Karouta]

Hi Milan,

Back in my Eindhoven's experience we had SS lines bringing bulk N2 from a tank on ground floor up to a clean room in 8th floor. Tank fittings and piping was all SS. We controlled the N2 purity at 8th floor and it was below 1ppm.
I have no experience with copper lines and purity, but here at ANU, the bulk N2 piping is in copper and we use N2 from cylinders to vent high end equipment (like ICP-RIE, PECVD, e-beam evaporator) while bulk N2 is used for venting low end equipment like a vacuum oven, a barrel etcher, etc.

Regards,
Fouad Karouta
ANFF ACT Node Manager
ANU, Australia

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Milan Begliarbekov
Sent: Saturday, 1 November 2014 3:15 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Venting Tools with Building Nitrogen

Hi All,

At the moment we're trying to decide the purity / source of the nitrogen we will use to vent our tools. The building has a bulk nitrogen system that is plumbed to the clean room in copper pipes. Our clean room contractor believes that that nitrogen might be too dirty to use as a vent gas and recommends ultra pure nitrogen. I am wondering if anyone has thoughts on this matter. I believe that it is possible to get 99.998 % N2 out of copper pipes. Is that the case? If not are there purifiers / dryers that are commonly used? This is only a vent gas and not a process gas.

Any wisdom in this matter will be highly appreciated.

Best,

milan
Technical Cleanroom Manager
CUNY Advanced Science Research Center
Milan.Begliarbekov at asrc.cuny.edu<mailto:Milan.Begliarbekov at asrc.cuny.edu>
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