[labnetwork] Litho Spinner

Michael Khbeis khbeis at uw.edu
Tue Sep 9 08:53:39 EDT 2014


Len,

Ever expanding resume... hope all is well.  The Headway's are a bit more pricey, but their D-style chuck mounts are very convenient.  Laurell's are a good product. Recently, we bought some tabletop SCS spinners, and all I can say is "eh".  It uses the Headway chuck design (interchangable) but they aren't the greatest units - acrylic lids that start to crack and they have a really finicky lid interlock and lid port that induces spin non-uniformity.  I do have some Suss LabSpin 8 units that are very nice, but were also 2x in price plus the electropolished hotplates.  I bought them with syringe dispense and EBR - both of which my folks don't use because of process instability with the dispensers. 

Best,

Dr. Michael Khbeis
Associate Director, Washington Nanofabrication Facility (WNF) 
National Nanotechnology Infrastructure Network (NNIN)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
www.wnf.washington.edu/



On Sep 8, 2014, at 5:06 PM, Olona, Leonard E. wrote:

> Rick and all my compadres,
> 
> Thank you all very much for the informative and unbiased advice regarding litho spinners.  
> 
> I have some price quotes already in the queue and should be placing an order very soon!
> 
> On a side note... I have accepted a new position at the University of Oklahoma Radar Innovation Laboratory as the Facility Manager.  I will also continue my role as the University Cleanroom Manager and will continue my participation in our awesome network!
> 
> Cheers!
> 
> Len
> 
> 
> 
> 
> 
> 
> 
> 
>> On Sep 8, 2014, at 6:54 PM, "Richard N. Savage" <rsavage at calpoly.edu> wrote:
>> 
>> Laurell and Brewer are other options....Rich
>> 
>> Richard N. Savage, Ph.D.
>> Director Graduate Education
>> Professor & Chair Biomedical Engineering
>> Cal Poly State University
>> Bldg 116-212
>> 1 Grand Avenue
>> San Luis Obispo, CA 93407
>> 805-756-6519
>> rsavage at calpoly.edu
>> 
>> ----- Original Message -----
>> From: "Leonard E. Olona" <len.olona at ou.edu>
>> To: labnetwork at mtl.mit.edu
>> Sent: Monday, September 8, 2014 10:58:04 AM
>> Subject: [labnetwork] Litho Spinner
>> 
>> All, 
>> 
>> We are looking for a new research sized litho resist spinner. 3" sized substrates max. 
>> 
>> Headway Research offers a nice spinner for around $8K. Any suggestions would be greatly appreciated. 
>> 
>> Thank you, 
>> -Len 
>> 
>> Leonard E. Olona 
>> Lab Manager , RIL 
>> Advanced Radar Research Center 
>> 3190 Monitor Ave 
>> Norman, OK 73019 
>> Office: (405) 325-4374 
>> Cell: (405) 630-9068 
>> 
>> 
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