[labnetwork] STS Multiplex ICP-MESC DRIE system for sale

Vicky Diadiuk diadiuk at mit.edu
Mon Sep 29 12:30:02 EDT 2014


HI,
 We arre selling an STS Multiplex ICP-MESC DRIE system, bought new in 2003.
The tool is set up for 6" wafers, has a two wafer load chamber, a balanced coil, onboard gas box, weighted clamp and comes with the platen chiller.
It was in our fab, maintained by STS, the entire time until Apr 2014 when we decommissioned because we bought a Pegasus & no longer had a need for it.
It would benefit from the Trinity software upgrade from SPTS (they no longer support the installed software). 
We think it's worth ~$100k, but we need the space urgently, so pls make an offer - it's highly negotiable :)
Thx,
Vicky



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