[labnetwork] burn box location

Iulian Codreanu codreanu at udel.edu
Mon Sep 29 17:32:28 EDT 2014


Dear Colleagues,

I am looking at the possibility of using a burn box (using natural gas 
for fuel) to abate the exhaust from some CVD tools.  I would have to 
locate it in the chase area.  It appears that a burn box is not that 
clean; I can imagine "soot" spreading throughout the cleanroom during 
maintenance.  Does anyone have burn boxes in the chase area?  How do you 
keep the soot contained?

Thank you very much.

Iulian

-- 
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784





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