[labnetwork] burn box location
Iulian Codreanu
codreanu at udel.edu
Mon Sep 29 17:32:28 EDT 2014
Dear Colleagues,
I am looking at the possibility of using a burn box (using natural gas
for fuel) to abate the exhaust from some CVD tools. I would have to
locate it in the chase area. It appears that a burn box is not that
clean; I can imagine "soot" spreading throughout the cleanroom during
maintenance. Does anyone have burn boxes in the chase area? How do you
keep the soot contained?
Thank you very much.
Iulian
--
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
Office: 163 ISE Lab
Mail to: 250N ISE Lab
Ship to: 165 ISE Lab
221 Academy Street
Newark, DE 19716
302-831-2784
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