[labnetwork] new materials for our sputter tool

[Ferraguto, Thomas]

Colleagues,

I have a customer who wants to use  YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF)

Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically)

Thanks
Tom


Thomas S. Ferraguto
Saab ETIC Nanofabrication Laboratory Director
University of Massachusetts Lowell
1 University Avenue
Lowell MA 01854-5120
978-934-1809 land
617-755-0910 mobile
978-934-1014 fax
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