[labnetwork] new materials for our sputter tool

[Mike Young]

Hi Tom. I have done *evaporated* ZnS in a *non-loadlocked* eveporator. The evaporation worked, but a few months after that, the evaporator was found to be trash - apparently a significant amount of H2SO4 is formed by the interaction of moist lab air with freshly-deposited ZnS. This may or may not be an issue for a good loadlocked sputtering system. Better safe than sorry...

--Mike


> On Apr 1, 2015, at 10:21 AM, Ferraguto, Thomas <Thomas_Ferraguto at uml.edu> wrote:
> 
> Colleagues,
> 
> I have a customer who wants to use  YF3 (Yttrium Fluoride) , Y2O3 (Yttrium Oxide), ZnS (Zinc Sulfide) , in our Lesker Sputter tool. It's a new lab line load lock tool (DC, DC-Pulse and RF)
> 
> Does anyone have a "Red Flags" for these materials? (I just don't have experience with these specifically)
> 
> Thanks
> Tom
> 
> 
> Thomas S. Ferraguto
> Saab ETIC Nanofabrication Laboratory Director
> University of Massachusetts Lowell
> 1 University Avenue
> Lowell MA 01854-5120
> 978-934-1809 land
> 617-755-0910 mobile
> 978-934-1014 fax
> 
> 

-- 
Michael P. Young                                (574) 631-3268 (office)
Nanofabrication Specialist                      (574) 631-4393 (fax)
Department of Electrical Engineering            (765) 637-6302 (cell)
University of Notre Dame                         mike.young at nd.edu
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637

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