[labnetwork] DRIE Tool

[Morrison, Richard H., Jr.]

I would like to thank everyone who responded to my general inquiry on tool vendors for DRIE tool. After a very lengthily review of references and etch test we elected to purchase a Rapier tool from SPTS. If any of you wants to go into this deeper send me an email off the lab-net list and I can respond. Your candid responses to my question were very helpful.

Again thanks for your help.

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

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