[labnetwork] Convectron gauges

[Morrison, Richard H., Jr.]

We use a TC vacuum gage with a digital readout, we have not experienced the issue you talk about.

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven
Sent: Tuesday, March 31, 2015 4:26 PM
To: Fab Network (labnetwork at mtl.mit.edu)
Subject: [labnetwork] Convectron gauges

Greeting fellow Nanofabbers,
  Has anyone experienced frequent failures of convectron style vacuum gauges in a Xenon Difluoride etcher?  I chose to use this style because it is important for us to observe vacuum over a wide range for this process, but within 10 hours of running time, the readout displays "bad sensor" or the gauge will not read above 3 Torr.   I have been using a major vacuum component supplier's version of a popular manufacturer's gauge and we have an isolation valve that closes during process. I suspect residual XeF2 is the culprit but I would like to hear from the community if there have been similar failures.
Thanks!

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>

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