[labnetwork] Convectron gauges

[Philip Kubik]

Hello Steve,

 

I had the same problem with a CF4 etcher. The gauge manufacturer told me
that fluorine attacks the coating on the filament.

 

 

Regards,

Philip

 

_________________________

 

Philip Kubik, Ph.D.
Staff Scientist
4D Labs, Simon Fraser University
8888 University Dr.
Burnaby, BC, Canada V5A 1S6
Office phone: 778-782-9818

Email:  <mailto:Philip.Kubik at 4DLabs.ca> Kubik at 4DLabs.ca

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Paolini, Steven
Sent: March 31, 2015 13:26
To: Fab Network (labnetwork at mtl.mit.edu)
Subject: [labnetwork] Convectron gauges

 

Greeting fellow Nanofabbers,

  Has anyone experienced frequent failures of convectron style vacuum gauges
in a Xenon Difluoride etcher?  I chose to use this style because it is
important for us to observe vacuum over a wide range for this process, but
within 10 hours of running time, the readout displays "bad sensor" or the
gauge will not read above 3 Torr.   I have been using a major vacuum
component supplier's version of a popular manufacturer's gauge and we have
an isolation valve that closes during process. I suspect residual XeF2 is
the culprit but I would like to hear from the community if there have been
similar failures.

Thanks!

 

Steve Paolini

Principal Equipment Engineer

Harvard University Center for Nanoscale Systems

617- 496- 9816

spaolini at cns.fas.harvard.edu

www.cns.fas.harvard.edu

 

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