[labnetwork] Convectron gauges

[JR Gaines]

Hello Steve,

One approach, when using corrosive gases, would be to use a gauge with a mechanical barrier between the environment to be sensed and the active component of the detector, like a capacitance manometer.

J.R.



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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven
Sent: Tuesday, March 31, 2015 4:26 PM
To: Fab Network (labnetwork at mtl.mit.edu)
Subject: [labnetwork] Convectron gauges

Greeting fellow Nanofabbers,
  Has anyone experienced frequent failures of convectron style vacuum gauges in a Xenon Difluoride etcher?  I chose to use this style because it is important for us to observe vacuum over a wide range for this process, but within 10 hours of running time, the readout displays “bad sensor” or the gauge will not read above 3 Torr.   I have been using a major vacuum component supplier’s version of a popular manufacturer’s gauge and we have an isolation valve that closes during process. I suspect residual XeF2 is the culprit but I would like to hear from the community if there have been similar failures.
Thanks!

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>

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