[labnetwork] SPTS (STS) Advanced Silicon Etcher

[Scott Blondell]

Does anyone have schematics, prints or other maintenance docs available for this tool?

We're having an RF tuning issue, with or without a plasma or RF actually on. One of the variable tuning caps is smooth in both directions
while the other cap seems to pulsate or move in steps in one direction, while smooth in the other. Through the computer, we can command
the cap adjust motors to move between 0 and 99% of their travel, so observing the problem doesn't require the RF to be on.

We've done some component and PCB swaps with no change. Has anyone experienced this or have any ideas?

Thanks!

Scott P. Blondell
Facilities Manager
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory<http://www.smfl.rit.edu/>
82 Lomb Memorial Dr.
Bldg. 17-2519
Rochester, NY 14623

585 738-4073 c
585 475-2171 o
585 475-5041 f
spb1699 at rit.edu<mailto:spb1699 at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>

[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]



-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20150810/87cb9fb7/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.jpg
Type: image/jpeg
Size: 2550 bytes
Desc: image001.jpg
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20150810/87cb9fb7/attachment.jpg>